Package-on-package assembly with wire bond vias

ABSTRACT

A structure includes a substrate having a first region and a second region, the substrate also having a first surface and a second surface. Electrically conductive elements are exposed at the first surface within the second region. Wire bonds have bases bonded to respective ones of the conductive elements and ends remote from the substrate and remote from the bases. At least one of the wire bonds has a shape such that the wire bond defines an axis between the free end and the base thereof and such that the wire bond defines a plane. A bent portion of the at least one wire bond extends away from the axis within the plane. A dielectric encapsulation layer covers portions of the wire bonds such that unencapsulated portions, including the ends, of the wire bonds are defined by portions of the wire bonds that are uncovered by the encapsulation layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. patent applicationSer. No. 13/795,811, filed Mar. 12, 2013, which is a continuation ofU.S. patent application Ser. No. 13/404,408, filed Feb. 24, 2012, whichclaims the benefit of the filing date of U.S. Provisional ApplicationNo. 61/547,930, filed Oct. 17, 2011, the disclosures of which areincorporated by reference herein.

BACKGROUND OF THE INVENTION

Microelectronic devices such as semiconductor chips typically requiremany input and output connections to other electronic components. Theinput and output contacts of a semiconductor chip or other comparabledevice are generally disposed in grid-like patterns that substantiallycover a surface of the device (commonly referred to as an “area array”)or in elongated rows which may extend parallel to and adjacent each edgeof the device's front surface, or in the center of the front surface.Typically, devices such as chips must be physically mounted on asubstrate such as a printed circuit board, and the contacts of thedevice must be electrically connected to electrically conductivefeatures of the circuit board.

Semiconductor chips are commonly provided in packages that facilitatehandling of the chip during manufacture and during mounting of the chipon an external substrate such as a circuit board or other circuit panel.For example, many semiconductor chips are provided in packages suitablefor surface mounting. Numerous packages of this general type have beenproposed for various applications. Most commonly, such packages includea dielectric element, commonly referred to as a “chip carrier” withterminals formed as plated or etched metallic structures on thedielectric. These terminals typically are connected to the contacts ofthe chip itself by features such as thin traces extending along the chipcarrier itself and by fine leads or wires extending between the contactsof the chip and the terminals or traces. In a surface mountingoperation, the package is placed onto a circuit board so that eachterminal on the package is aligned with a corresponding contact pad onthe circuit board. Solder or other bonding material is provided betweenthe terminals and the contact pads. The package can be permanentlybonded in place by heating the assembly so as to melt or “reflow” thesolder or otherwise activate the bonding material.

Many packages include solder masses in the form of solder balls,typically about 0.1 mm and about 0.8 mm (5 and mils) in diameter,attached to the terminals of the package. A package having an array ofsolder balls projecting from its bottom surface is commonly referred toas a ball grid array or “BGA” package. Other packages, referred to asland grid array or “LGA” packages are secured to the substrate by thinlayers or lands formed from solder. Packages of this type can be quitecompact. Certain packages, commonly referred to as “chip scalepackages,” occupy an area of the circuit board equal to, or onlyslightly larger than, the area of the device incorporated in thepackage. This is advantageous in that it reduces the overall size of theassembly and permits the use of short interconnections between variousdevices on the substrate, which in turn limits signal propagation timebetween devices and thus facilitates operation of the assembly at highspeeds.

Packaged semiconductor chips are often provided in “stacked”arrangements, wherein one package is provided, for example, on a circuitboard, and another package is mounted on top of the first package. Thesearrangements can allow a number of different chips to be mounted withina single footprint on a circuit board and can further facilitatehigh-speed operation by providing a short interconnection betweenpackages. Often, this interconnect distance is only slightly larger thanthe thickness of the chip itself. For interconnection to be achievedwithin a stack of chip packages, it is necessary to provide structuresfor mechanical and electrical connection on both sides of each package(except for the topmost package). This has been done, for example, byproviding contact pads or lands on both sides of the substrate to whichthe chip is mounted, the pads being connected through the substrate byconductive vias or the like. Solder balls or the like have been used tobridge the gap between the contacts on the top of a lower substrate tothe contacts on the bottom of the next higher substrate. The solderballs must be higher than the height of the chip in order to connect thecontacts. Examples of stacked chip arrangements and interconnectstructures are provided in U.S. Patent App. Pub. No. 2010/0232129 (“the'129 Publication”), the disclosure of which is incorporated by referenceherein in its entirety.

Microcontact elements in the form of elongated posts or pins may be usedto connect microelectronic packages to circuit boards and for otherconnections in microelectronic packaging. In some instances,microcontacts have been formed by etching a metallic structure includingone or more metallic layers to form the microcontacts. The etchingprocess limits the size of the microcontacts. Conventional etchingprocesses typically cannot form microcontacts with a large ratio ofheight to maximum width, referred to herein as “aspect ratio”. It hasbeen difficult or impossible to form arrays of microcontacts withappreciable height and very small pitch or spacing between adjacentmicrocontacts. Moreover, the configurations of the microcontacts formedby conventional etching processes are limited.

Despite all of the above-described advances in the art, still furtherimprovements in making and testing microelectronic packages would bedesirable.

SUMMARY OF THE INVENTION

An aspect of the present disclosure relates to a microelectronic packageincluding a substrate having a first region and a second region. Thesubstrate also has a first surface and a second surface remote from thefirst surface. At least one microelectronic element overlies the firstsurface within the first region. The package also includes electricallyconductive elements exposed at the first surface of the substrate withinthe second region. At least some of the conductive elements areelectrically connected to the at least one microelectronic element. Thepackage further includes wire bonds having bases bonded to respectiveones of the conductive elements and ends remote from the substrate andremote from the bases. The ends of the wire bonds are defined on tips ofthe wire bonds, and the wire bonds define respective first diametersbetween the bases and the tips thereof. The tips have at least onedimension that is smaller than the respective first diameters of thewire bonds. A dielectric encapsulation layer extends from at least oneof the first or second surfaces and covers portions of the wire bondssuch that covered portions of the wire bonds are separated from oneanother by the encapsulation layer. The encapsulation layer overlies atleast the second region of the substrate, and unencapsulated portions ofthe wire bonds, including the ends thereof, are defined by portions ofthe wire bonds that are uncovered by the encapsulation layer.

In an example, at least some of the tips can further define centroidswhich are offset in a radial direction from axes of cylindrical portionsof the wire bonds. In another example, the tips can further have asecond dimension that is smaller than the first diameter. In any of suchexamples, the tips can include a bonding tool mark thereon. Inparticular, tips can include a first side and a second side, the bondingtool mark being at least on the first side of the tips.

A first one of the wire bonds can be adapted for carrying a first signalelectric potential and a second one of the wire bonds can be adapted forsimultaneously carrying a second signal electric potential differentfrom the first signal electric potential.

Each wire bond can have an edge surface extending between the base andthe end thereof. In such an example the unencapsulated portions of thewire bonds can be defined by the ends of the wire bonds and portions ofedge surfaces adjacent the ends that are uncovered by the encapsulationlayer. The portions of the edge surfaces adjacent the ends that areuncovered by the encapsulation layer can extend through the tips.

An end of at least one of the wire bonds can be displaced in a directionparallel to the first surface of the substrate from its base by at leasta distance equal to one of: a minimum pitch between adjacent conductiveelements of the plurality of conductive elements, and 100 microns. In aparticular example, at least one of the wire bonds can include at leastone bend between the base thereof and the unencapsulated portionthereof. In another example, the bases of the wire bonds can be disposedat positions in a first pattern having a first minimum pitch betweenrespective adjacent bases of the plurality of wire bonds, and theunencapsulated portions of the wire bonds can be disposed at positionsin a second pattern having a second minimum pitch between respectiveadjacent unencapsulated portions of wire bonds of the plurality of wirebonds. In such an example, the second minimum pitch can be greater thanthe first pitch.

Another aspect of the present disclosure relates to a microelectronicpackage including a substrate having a first region and a second region.The substrate has a first surface and a second surface remote from thefirst surface. At least one microelectronic element overlies the firstsurface within the first region. Electrically conductive elements areexposed at the first surface of the substrate within the second region,at least some of which are electrically connected to the at least onemicroelectronic element. The package also includes wire bonds havingbases bonded to respective ones of the conductive elements and endsremote from the substrate and remote from the bases. The wire bondsfurther include bonding tool marks adjacent the ends. A dielectricencapsulation layer extends from at least one of the first or secondsurfaces and covers portions of the wire bonds such that coveredportions of the wire bonds are separated from one another by theencapsulation layer. The encapsulation layer overlies at least thesecond region of the substrate, and unencapsulated portions of the wirebonds are defined by portions of the wire bonds that are uncovered bythe encapsulation layer. The unencapsulated portions include the ends.

The ends of at least some of the wire bonds can be defined on tips ofthe wire bonds. In such an example, the wire bonds can define firstdiameters between the bases and the tips, and the tips can have at leastone dimension that is smaller than the first diameter. The tips canfurther have a second dimension that is smaller than the first diameter.In a further example, the bonding tool mark can be located on the tip ofthe wire bond. The tips can include a first side and a second sidethereof, and the bonding tool mark can be at least on the first side ofthe tip.

An end of at least one of the wire bonds can be displaced in a directionparallel to the first surface of the substrate from its base by at leasta distance equal to one of: a minimum pitch between adjacent conductiveelements of the plurality of conductive elements, and 100 microns.

Another aspect of the present disclosure relates to a method of making amicroelectronic package. The method includes forming a plurality of wirebonds on an in-process unit including a substrate having a first surfaceand a second surface remote therefrom and a plurality of conductiveelements exposed at the first surface. The formation of the wire bondsincludes joining a metal wire to a respective one of the conductiveelements to form a base of the wire bond, and feeding a predeterminedlength of the wire out of a capillary of a bonding tool. The wiresegment is then severed at least by pressing the wire segment intocontact with a secondary surface using the capillary so as to form anend of the wire bond remote from the base, an edge surface of the wirebond extending between the base and the end. The method further includesforming a dielectric encapsulation layer on the in-process unit. Theencapsulation layer is formed so as to at least partially cover thefirst surface and portions of the wire bonds such that unencapsulatedportions of the wire bonds are defined by at least ends of the wirebonds that are uncovered by the encapsulation layer.

The method can further include mounting a microelectronic element to thesubstrate such that the method electrically interconnects themicroelectronic element with at least some of the conductive elements.

In an example of the present method, joining the metal wire segment tothe respective one of the conductive elements can be done byball-bonding. Further, the formation of at least some of the wire bondscan further include forming a bend in the wire segment before thesevering step.

The step of severing can forms tips of the wire bonds on which the endsare defined. In such an example, the wire bonds can define firstdiameters between the bases and the tips, and the tips can have at leastone dimension that is smaller than the first diameter. The tips canfurther be formed having a second dimension that is smaller than thefirst diameter. The step of severing can form at least one bonding toolmark on the tips of the wire bonds. Further, the step of severing canform the tips such that the tips includes a first side and a secondside, the bonding tool mark being at least on the first side of thetips.

Another aspect of the present disclosure relates to a structure,including a substrate having a first region and a second region, thesubstrate also having a first surface and a second surface remote fromthe first surface. Electrically conductive elements are exposed at thefirst surface of the substrate within the second region. The structurefurther includes wire bonds having bases bonded to respective ones ofthe conductive elements and ends remote from the substrate and remotefrom the bases. At least one of the wire bonds has a shape such that thewire bond defines an axis between the free end and the base thereof andsuch that the wire bond defines a plane. A bent portion of the at leastone wire bond extends away from the axis within the plane. A dielectricencapsulation layer extends from at least one of the first or secondsurfaces and covers portions of the wire bonds such that coveredportions of the wire bonds are separated from one another by theencapsulation layer. The encapsulation layer overlies at least thesecond region of the substrate. Unencapsulated portions of the wirebonds are defined by portions of the wire bonds that are uncovered bythe encapsulation layer. The unencapsulated portions include the ends.The conductive elements are configured to couple the wire bonds to oneor more microelectronic elements. The entire wire bond can be positionedon the axis or on one side of the axis within the plane.

The structure can further include at least one microelectronic elementoverlying one of the first surface or the second surface within thefirst region, and at least some of the conductive elements can beelectrically connected to the at least one microelectronic element.

The bent portion of the at least one wire bond can be adjacent the basethereof. In another example, the shape of the at least one wire bond canfurther be such that a substantially straight portion of the wire bondextends between the free end and the bent portion along the axis. Theaxis of the at least one wire bond can be defined between a portion ofthe free end and a portion of the base with the axis being at andtangent to an edge surface of the wire on a side thereof opposite thebend within both portions. An example of the at least one wire bond caninclude only a single bent portion.

The axis of the shape of the at least one wire bond can be at an angleof less than 90 degrees with respect to the first surface of thesubstrate. In a further example, the base of the at least one wire bondcan be a ball bond, and the axis can extend through or along a portionof the ball bond. In such an example the end of the at least one wirebond can be positioned directly above the base.

The ends of the wire bonds can be defined on tips of the wire bonds, andthe wire bonds can define respective first diameters between the basesand the tips thereof. The tips can have at least one dimension that issmaller than the respective first diameters of the wire bonds.

Another aspect of the present disclosure relates to a microelectronicpackage including a substrate having a first region and a second region.The substrate also has a first surface and a second surface remote fromthe first surface. At least one microelectronic element overlies thefirst surface within the first region. Electrically conductive elementsare exposed at the first surface of the substrate within the secondregion, and at least some of the conductive elements are electricallyconnected to the at least one microelectronic element. The packagefurther includes wire bonds having bases bonded to respective ones ofthe conductive elements and ends remote from the substrate and remotefrom the bases. At least one of the wire bonds has a shape such that thewire bond defines an axis between the free end and the base thereof,such that the wire bond defines a plane, and such that a bent portion ofthe at least one wire bond is defined between the base and the endthereof. The entire wire bond is positioned on the axis or on one sideof the axis within the plane. A dielectric encapsulation layer extendsfrom at least one of the first or second surfaces and covers portions ofthe wire bonds such that covered portions of the wire bonds areseparated from one another by the encapsulation layer. The encapsulationlayer overlies at least the second region of the substrate, andunencapsulated portions of the wire bonds are defined by portions of thewire bonds that are uncovered by the encapsulation layer. Theunencapsulated portions include the ends. The bent portion of the atleast one wire bond can extend away from the axis within the plane.

Another aspect of the present disclosure relates to a method of making amicroelectronic package. The method includes forming a plurality of wirebonds on an in-process unit including a substrate having a first surfaceand a second surface remote therefrom and a plurality of conductiveelements exposed at the first surface. The formation of at least some ofthe wire bonds includes joining a metal wire to a respective one of theconductive elements to form a base of the wire bond, feeding apredetermined length of the wire out of a capillary of a bonding tool,and severing the wire segment at least by pressing the wire segment intocontact with a secondary surface using the capillary so as to form anend of the wire bond remote from the base, an edge surface of the wirebond extending between the base and the end. The method further includesforming a dielectric encapsulation layer on the in process unit. Theencapsulation layer is formed so as to at least partially cover thefirst surface and portions of the wire bonds such that unencapsulatedportions of the wire bonds are defined by at least the ends of the wirebonds that are uncovered by the encapsulation layer. The steps offeeding and severing are carried out to impart a shape on the wire bondsuch that the wire bond defines an axis between the free end and thebase, the wire bond being bent to extend away from the axis on a plane,and the entire wire bond being substantially positioned on the plane ona single side of the axis.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is sectional view depicting a microelectronic package accordingto an embodiment of the invention.

FIG. 2 shows a top plan view of the microelectronic package of FIG. 1.

FIG. 3 is a sectional view depicting a microelectronic package accordingto a variation of the embodiment shown in FIG. 1.

FIG. 4 is a sectional view depicting a microelectronic package accordingto a variation of the embodiment shown in FIG. 1.

FIG. 5A is a sectional view depicting a microelectronic packageaccording to a variation of the embodiment shown in FIG. 1.

FIG. 5B is a fragmentary sectional view depicting a conductive elementformed on an unencapsulated portion of a wire bond according to anembodiment of the invention.

FIG. 5C is a fragmentary sectional view depicting a conductive elementformed on an unencapsulated portion of a wire bond according to avariation of that shown in FIG. 5B.

FIG. 5D is a fragmentary sectional view depicting a conductive elementformed on an unencapsulated portion of a wire bond according to avariation of that shown in FIG. 5B.

FIG. 6 is a sectional view illustrating a microelectronic assemblyincluding a microelectronic package according to one or more of theforegoing embodiments and an additional microelectronic package and acircuit panel electrically connected thereto.

FIG. 7 is a top elevation view illustrating a microelectronic packageaccording to an embodiment of the invention.

FIG. 8 is a fragmentary top elevation view further illustrating amicroelectronic package according to an embodiment of the invention.

FIG. 9 is a top elevation view illustrating a microelectronic packageincluding a lead frame type substrate according to an embodiment of theinvention.

FIG. 10 is a corresponding sectional view of the microelectronic packageshown in FIG. 9.

FIG. 11 is a sectional view of a microelectronic assembly including aplurality of microelectronic packages electrically connected togetherand reinforced with an underfill according to a variation of theembodiment shown in FIG. 6.

FIG. 12 is a photographic image representing an assembly having bondsbetween wire bonds of a first component and solder masses of a secondcomponent attached thereto.

FIG. 13A is a fragmentary sectional view illustrating a wire bond via ina microelectronic package according to an embodiment of the invention.

FIG. 13B is a fragmentary sectional view illustrating a wire bond via ina microelectronic package according to an embodiment of the invention.

FIG. 13C is an enlarged fragmentary sectional view illustrating a wirebond via in a microelectronic package according to the embodiment shownin FIG. 13B.

FIG. 13D is a fragmentary sectional view illustrating a wire bond via ina microelectronic package according to an embodiment of the invention.

FIG. 13E is an enlarged fragmentary sectional view illustrating a wirebond via in a microelectronic package according to the embodiment shownin FIG. 13D.

FIG. 13F is a fragmentary sectional view illustrating a wire bond via ina microelectronic package according to an embodiment of the invention.

FIG. 14 illustrates stages in a method of forming a metal wire segmentprior to bonding the wire segment to a conductive element according toan embodiment of the invention.

FIG. 15 further illustrates a method as depicted in FIG. 14 and aforming unit suitable for use in such method.

FIG. 16 is a top elevation view illustrating wire bonds formed accordingto an embodiment of the invention.

FIG. 17 illustrates stages in a method of forming a metal wire segmentprior to bonding the wire segment to a conductive element according toan embodiment of the invention.

FIGS. 18 and 19 are sectional views illustrating one stage and anotherstage subsequent thereto in a method of forming an encapsulation layerof a microelectronic package according to an embodiment of theinvention.

FIG. 20 is an enlarged sectional view further illustrating the stagecorresponding to FIG. 19.

FIG. 21 is a sectional view illustrating a stage of fabricating anencapsulation layer of a microelectronic package according to anembodiment of the invention.

FIG. 22 is a sectional view illustrating a stage of fabricating anencapsulation layer of a microelectronic package subsequent to the stageshown in FIG. 21.

FIGS. 23A and 23B are fragmentary sectional views illustrating wirebonds according to another embodiment.

FIGS. 24A and 24B are sectional views of a microelectronic packageaccording to a further embodiment.

FIGS. 25A and 25B are sectional views of a microelectronic packageaccording to a further embodiment.

FIG. 26 shows a sectional view of a microelectronic package according toanother embodiment.

FIGS. 27A-C are sectional views showing examples of embodiments ofmicroelectronic packages according to further embodiments.

FIGS. 28A-D show various embodiments of microelectronic packages duringsteps of forming a microelectronic assembly according to an embodimentof the disclosure.

FIG. 29 shows another embodiment of microelectronic packages duringsteps of forming a microelectronic assembly according to an embodimentof the disclosure.

FIGS. 30 A-C show embodiments of microelectronic packages during stepsof forming a microelectronic assembly according to another embodiment ofthe disclosure.

FIGS. 31 A-C show embodiments of microelectronic packages during stepsof forming a microelectronic assembly according to another embodiment ofthe disclosure.

FIGS. 32A and 32B show a portion of a machine that can be used informing various wire bond vias in various stages of a method accordingto another embodiment of the present disclosure.

FIG. 33 shows a portion of a machine that can be used in forming variouswire bond vias according in a method according to another embodiment ofthe present disclosure.

FIGS. 34A-C show various forms of an instrument that can be used in amethod for making wire bonds according to an embodiment of the presentdisclosure.

FIG. 35 shows a portion of a machine that can be used in forming variouswire bond vias according in a method according to another embodiment ofthe present disclosure.

FIG. 36 shows a portion of a machine that can be used in forming variouswire bond vias according in a method according to another embodiment ofthe present disclosure.

FIGS. 37 A-D show sectional views illustrating stages of fabricating amicroelectronic package according to an embodiment of the presentdisclosure.

FIGS. 38A and 38B show sectional views illustrating stages offabricating a microelectronic package according to another embodiment ofthe present disclosure.

FIGS. 39A-C show sectional views illustrating stages of fabricating amicroelectronic package according to another embodiment of the presentdisclosure.

DETAILED DESCRIPTION

Turning now to the figures, where similar numeric references are used toindicate similar features, there is shown in FIG. 1 a microelectronicassembly 10 according to an embodiment of the present invention. Theembodiment of FIG. 1 is a microelectronic assembly in the form of apackaged microelectronic element such as a semiconductor chip assemblythat is used in computer or other electronic applications.

The microelectronic assembly 10 of FIG. 1 includes a substrate 12 havinga first surface 14 and a second surface 16. The substrate 12 typicallyis in the form of a dielectric element, which is substantially flat. Thedielectric element may be sheet-like and may be thin. In particularembodiments, the dielectric element can include one or more layers oforganic dielectric material or composite dielectric materials, such as,without limitation: polyimide, polytetrafluoroethylene (“PTFE”), epoxy,epoxy-glass, FR-4, BT resin, thermoplastic, or thermoset plasticmaterials. The substrate may be a substrate of a package havingterminals for further electrical interconnection with a circuit panel,e.g., a circuit board. Alternatively, the substrate can be a circuitpanel or circuit board. In one example thereof, the substrate can be amodule board of a dual-inline memory module (“DIMM”). In yet anothervariation, the substrate can be a microelectronic element such as may beor include a semiconductor chip embodying a plurality of active devices,e.g., in form of an integrated circuit or otherwise.

The first surface 14 and second surface 16 are preferably substantiallyparallel to each other and are spaced apart at a distance perpendicularto the surfaces 14,16 defining the thickness of the substrate 12. Thethickness of substrate 12 is preferably within a range of generallyacceptable thicknesses for the present application. In an embodiment,the distance between the first surface 14 and the second surface 16 isbetween about 25 and 500 μm. For purposes of this discussion, the firstsurface 14 may be described as being positioned opposite or remote fromsecond surface 16. Such a description, as well as any other descriptionof the relative position of elements used herein that refers to avertical or horizontal position of such elements is made forillustrative purposes only to correspond with the position of theelements within the Figures, and is not limiting.

In a preferred embodiment, substrate 12 is considered as divided into afirst region 18 and a second region 20. The first region 18 lies withinthe second region and includes a central portion of the substrate 12 andextends outwardly therefrom. The second region 20 substantiallysurrounds the first region 18 and extends outwardly therefrom to theouter edges of the substrate 12. In this embodiment, no specificcharacteristic of the substrate itself physically divides the tworegions; however, the regions are demarked for purposes of discussionherein with respect to treatments or features applied thereto orcontained therein.

A microelectronic element 22 can be mounted to first surface 14 ofsubstrate 12 within first region 18. Microelectronic element 22 can be asemiconductor chip or another comparable device. In the embodiment ofFIG. 1, microelectronic element 22 is mounted to first surface 14 inwhat is known as a conventional or “face-up” fashion. In such anembodiment, wire leads 24 can be used to electrically connectmicroelectronic element 22 to some of a plurality of conductive elements28 exposed at first surface 14. Wire leads 24 can also be joined totraces (not shown) or other conductive features within substrate 12 thatare, in turn, connected to conductive elements 28.

Conductive elements 28 include respective “contacts” or pads 30 that areexposed at the first surface 14 of substrate 12. As used in the presentdescription, when an electrically conductive element is described asbeing “exposed at” the surface of another element having dielectricstructure, it indicates that the electrically conductive structure isavailable for contact with a theoretical point moving in a directionperpendicular to the surface of the dielectric structure toward thesurface of the dielectric structure from outside the dielectricstructure. Thus, a terminal or other conductive structure that isexposed at a surface of a dielectric structure may project from suchsurface; may be flush with such surface; or may be recessed relative tosuch surface and exposed through a hole or depression in the dielectric.The conductive elements 28 can be flat, thin elements in which pad 30 isexposed at first surface 14 of substrate 12. In one embodiment,conductive elements 28 can be substantially circular and can beinterconnected between each other or to microelectronic element 22 bytraces (not shown). Conductive elements 28 can be formed at least withinsecond region 20 of substrate 12. Additionally, in certain embodiments,conductive elements 28 can also be formed within first region 18. Suchan arrangement is particularly useful when mounting microelectronicelement 122 (FIG. 3) to substrate 112 in what is known as a “flip-chip”configuration, where contacts on the microelectronic element 122 can beconnected to conductive elements 128 within first region 118 by solderbumps 126 or the like that are positioned beneath microelectronicelement 122. In an embodiment, conductive elements 28 are formed from asolid metal material such as copper, gold, nickel, or other materialsthat are acceptable for such an application, including various alloysincluding one or more of copper, gold, nickel or combinations thereof.

At least some of conductive elements 28 can be interconnected tocorresponding second conductive elements 40, such as conductive pads,exposed at second surface 16 of substrate 12. Such an interconnectioncan be completed using vias 41 formed in substrate 12 that can be linedor filled with conductive metal that can be of the same material asconductive elements 28 and 40. Optionally, conductive elements 40 can befurther interconnected by traces on substrate 12.

Microelectronic assembly 10 further includes a plurality of wire bonds32 joined to at least some of the conductive elements 28, such as on thepads 30 thereof. Wire bonds 32 are bonded along a portion of the edgesurface 37 thereof to the conductive elements 28. Examples of suchbonding include stitch bonding, wedge bonding and the like. As will bedescribed in further detail below, a wire bonding tool can be used tostitch-bond a segment of wire extending from a capillary of the wirebonding tool to a conductive element 28 while severing the stitch-bondedend of the wire from a supply of wire in the capillary. The wire bondsare stitch-bonded to the conductive elements 28 at their respective“bases” 34. Hereinafter, the “base” 34 of such stitch-bonded wire bond32 refers to the portion of the wire bond which forms a joint with theconductive element 28. Alternatively, wire bonds can be joined to atleast some of the conductive elements using ball bonds, examples ofwhich are shown and described in co-pending, commonly assigned U.S.patent application, the entire disclosure of which is incorporated byreference herein.

The incorporation of various forms of edge bonds, as described herein,can allow for conductive elements 28 to be non-solder-mask-defined(“NSMD”) type conductive elements. In packages using other types ofconnections to conductive elements, for example solder balls or thelike, the conductive elements are solder-mask defined. That is theconductive elements are exposed in openings formed in a solder maskmaterial layer. In such an arrangement, the solder mask layer canpartially overlie the conductive elements or can contact the conductiveelements along an edge thereof. By contrast, a NSMD conductive elementis one that is not contacted by a solder mask layer. For example, theconductive element can be exposed on a surface of a substrate that doesnot have a solder mask layer or, if present, a solder mask layer on thesurface can have an opening with edges spaced away from the conductiveelement. Such NSMD conductive elements can also be formed in shapes thatare not round. Solder-mask defined pads can often be round when intendedto be used to bond to an element via a solder mass, which forms agenerally round profile on such a surface. When using, for example, anedge bond to attach to a conductive element, the bond profile itself isnot round, which can allow for a non-round conductive element. Suchnon-round conductive elements can be, for example oval, rectangular, orof a rectangular shape with rounded corners. They can further beconfigured to be longer in the direction of the edge bond to accommodatethe bond, while being shorter in the direction of the wire bond's 32width. This can allow for a finer pitch at the substrate 12 level. Inone example, the conductive elements 28 can be between about 10% and 25%larger than the intended size of base 34 in both directions. This canallow for variations in the precision with which the bases 34 arelocated and for variations in the bonding process.

In some embodiments, an edge bonded wire bond, as described above, whichcan be in the form of a stitch bond, can be combined with a ball bond.As shown in FIG. 23A a ball bond 1333 can be formed on a conductiveelement 1328 and a wire bond 1332 can be formed with a base 1338 stitchbonded along a portion of the edge surface 1337 to ball bond 1372. Inanother example, the general size and placement of the ball bond can beas shown at 1372′. In another variation shown in FIG. 23B, a wire bond1332 can be edge bonded along conductive element 1328, such as by stitchbonding, as described above. A ball bond 1373 can then be formed on topof the base 1338 of wire bond 1334. In one example, the size andplacement of the ball bond can be as shown at 1373′. Each of the wirebonds 32 can extend to a free end 36 remote from the base 34 of suchwire bond and remote from substrate 12. The ends 36 of wire bonds 32 arecharacterized as being free in that they are not electrically connectedor otherwise joined to microelectronic element 22 or any otherconductive features within microelectronic assembly 10 that are, inturn, connected to microelectronic element 22. In other words, free ends36 are available for electronic connection, either directly orindirectly as through a solder ball or other features discussed herein,to a conductive feature external to assembly 10. The fact that ends 36are held in a predetermined position by, for example, encapsulationlayer 42 or otherwise joined or electrically connected to anotherconductive feature does not mean that they are not “free” as describedherein, so long as any such feature is not electrically connected tomicroelectronic element 22. Conversely, base 34 is not free as it iseither directly or indirectly electrically connected to microelectronicelement 22, as described herein. As shown in FIG. 1, the bases 34 of thewire bonds 32 typically are curved at their stitch-bond (or otheredge-bonded) joints with the respective conductive elements 28. Eachwire bond has an edge surface 37 extending between the base 34 thereofand the end 36 of such wire bond. The particular size and shape of base34 can vary according to the type of material used to form wire bond 32,the desired strength of the connection between wire bond 32 andconductive element 28, or the particular process used to form wire bond32. Alternative embodiments are possible where wire bonds 32 areadditionally or alternatively joined to conductive elements 40 exposedon second surface 16 of substrate 12, extending away therefrom.

In a particular example, a first one of the wire bonds 32 may beadapted, i.e., constructed, arranged, or electrically coupled to othercircuitry on the substrate for carrying a first signal electricpotential, and a second one of the wire bonds 32 may be so adapted forsimultaneously carrying a second signal electric potential differentfrom the first signal electric potential. Thus, when a microelectronicpackage as seen in FIGS. 1 and 2 is energized, the first and second wirebonds can simultaneously carry first and second different signalelectric potentials.

Wire bond 32 can be made from a conductive material such as copper,copper alloy or gold. Additionally, wire bonds 32 can be made fromcombinations of materials, such as from a core of a conductive material,such as copper or aluminum, for example, with a coating applied over thecore. The coating can be of a second conductive material, such asaluminum, nickel or the like. Alternatively, the coating can be of aninsulating material, such as an insulating jacket.

In particular embodiments, the wire bonds may have a core of primarymetal and a metallic finish including a second metal different from theprimary metal overlying the primary metal. For example, the wire bondsmay have a primary metal core of copper, copper alloy or gold and themetallic finish can include palladium. Palladium can avoid oxidation ofa core metal such as copper, and may serve as a diffusion barrier toavoid diffusion a solder-soluble metal such as gold in solder jointsbetween unencapsulated portions 39 of the wire bonds and anothercomponent as will be described further below. Thus, in one embodiment,the wire bonds can be formed of palladium-coated copper wire orpalladium-coated gold wire which can be fed through the capillary of thewire bonding tool.

In an embodiment, the wire used to form wire bonds 32 can have athickness, i.e., in a dimension transverse to the wire's length, ofbetween about 15 μm and 150 μm. In general, a wire bond is formed on aconductive element, such as conductive element 28, a pad, trace or thelike, using specialized equipment that is known in the art. The free end36 of wire bond 32 has an end surface 38. End surface 38 can form atleast a part of a contact in an array formed by respective end surfaces38 of a plurality of wire bonds 32. FIG. 2 shows an exemplary patternfor such an array of contacts formed by end surfaces 38. Such an arraycan be formed in an area array configuration, variations of which couldbe implemented using the structures described herein. Such an array canbe used to electrically and mechanically connect the microelectronicassembly 10 to another microelectronic structure, such as to a printedcircuit board (“PCB”), or to other packaged microelectronic elements, anexample of which is shown in FIG. 6. In such a stacked arrangement, wirebonds 32 and conductive elements 28 and 40 can carry multiple electronicsignals therethrough, each having a different signal potential to allowfor different signals to be processed by different microelectronicelements in a single stack. Solder masses 52 can be used to interconnectthe microelectronic assemblies in such a stack, such as byelectronically and mechanically attaching end surfaces 38 to conductiveelements 40.

Microelectronic assembly 10 further includes an encapsulation layer 42formed from a dielectric material. In the embodiment of FIG. 1,encapsulation layer 42 is formed over the portions of first surface 14of substrate 12 that are not otherwise covered by or occupied bymicroelectronic element 22, or conductive elements 28. Similarly,encapsulation layer 42 is formed over the portions of conductiveelements 28, including pad 30 thereof, that are not otherwise covered bywire bonds 32. Encapsulation layer 42 can also substantially covermicroelectronic element 22, wire bonds 32, including the bases 34 and atleast a portion of edge surfaces 37 thereof. A portion of wire bonds 32can remain uncovered by encapsulation layer 42, which can also bereferred to as unencapsulated portions 39, thereby making the wire bondavailable for electrical connection to a feature or element locatedoutside of encapsulation layer 42. In an embodiment, end surfaces 38 ofwire bonds 32 remain uncovered by encapsulation layer 42 within majorsurface 44 of encapsulation layer 42. Other embodiments are possible inwhich a portion of edge surface 37 is uncovered by encapsulation layer42 in addition to or as an alternative to having end surface 38 remainuncovered by encapsulation layer 42. In other words, encapsulation layer42 can cover all of microelectronic assembly 10 from first surface 14and above, with the exception of a portion of wire bonds 36, such as endsurfaces 38, edge surfaces 37 or combinations of the two. In theembodiments shown in the Figures, a surface, such as major surface 44 ofencapsulation layer 42 can be spaced apart from first surface 14 ofsubstrate 12 at a distance great enough to cover microelectronic element22. Accordingly, embodiments of microelectronic assembly 10 in whichends 38 of wire bonds 32 are flush with surface 44, will include wirebonds 32 that are taller than the microelectronic element 22, and anyunderlying solder bumps for flip chip connection. Other configurationsfor encapsulation layer 42, however, are possible. For example, theencapsulation layer can have multiple surfaces with varying heights. Insuch a configuration, the surface 44 within which ends 38 are positionedcan be higher or lower than an upwardly facing surface under whichmicroelectronic element 22 is located.

Encapsulation layer 42 serves to protect the other elements withinmicroelectronic assembly 10, particularly wire bonds 32. This allows fora more robust structure that is less likely to be damaged by testingthereof or during transportation or assembly to other microelectronicstructures. Encapsulation layer 42 can be formed from a dielectricmaterial with insulating properties such as that described in U.S.Patent App. Pub. No. 2010/0232129, which is incorporated by referenceherein.

FIG. 3 shows an embodiment of microelectronic assembly 110 having wirebonds 132 with ends 136 that are not positioned directly above therespective bases 34 thereof. That is, considering first surface 114 ofsubstrate 112 as extending in two lateral directions, so as tosubstantially define a plane, end 136 or at least one of the wire bonds132 is displaced in at least one of these lateral directions from acorresponding lateral position of base 134. As shown in FIG. 3, wirebonds 132 can be substantially straight along the longitudinal axisthereof, as in the embodiment of FIG. 1, with the longitudinal axisbeing angled at an angle 146 with respect to first surface 114 ofsubstrate 112. Although the cross-sectional view of FIG. 3 only showsthe angle 146 through a first plane perpendicular to first surface 114,wire bond 132 can also be angled with respect to first surface 114 inanother plane perpendicular to both that first plane and to firstsurface 114. Such an angle can be substantially equal to or differentthan angle 146. That is the displacement of end 136 relative to base 134can be in two lateral directions and can be by the same or a differentdistance in each of those directions.

In an embodiment, various ones of wire bonds 132 can be displaced indifferent directions and by different amounts throughout the assembly110. Such an arrangement allows for assembly 110 to have an array thatis configured differently on the level of surface 144 compared to on thelevel of substrate 12. For example, an array can cover a smaller overallarea or have a smaller pitch on surface 144 compared to that at firstsurface 114 of substrate 112. Further, some wire bonds 132 can have ends138 that are positioned above microelectronic element 122 to accommodatea stacked arrangement of packaged microelectronic elements of differentsizes. In another example, wire bonds 132 can be configured such thatthe end of one wire bond is positioned substantially above the base of asecond wire bond, wherein the end of that second wire bond beingpositioned elsewhere. Such an arrangement can be referred to as changingthe relative position of a contact end surface 136 within an array ofcontacts, compared to the position of a corresponding contact array onsecond surface 116. In another example, shown in FIG. 8, wire bonds 132can be configured such that the end 136A of one wire bond 132A ispositioned substantially above the base 134B of another wire bond 134B,the end 132B of that wire bond 134B being positioned elsewhere. Such anarrangement can be referred to as changing the relative position of acontact end surface 136 within an array of contacts, compared to theposition of a corresponding contact array on second surface 116. Withinsuch an array, the relative positions of the contact end surfaces can bechanged or varied, as desired, depending on the microelectronicassembly's application or other requirements. FIG. 4 shows a furtherembodiment of a microelectronic subassembly 210 having wire bonds 232with ends 236 in displaced lateral positions with respect to bases 234.In the embodiment of FIG. 4, the wire bonds 132 achieve this lateraldisplacement by including a curved portion 248 therein. Curved portion248 can be formed in an additional step during the wire bond formationprocess and can occur, for example, while the wire portion is beingdrawn out to the desired length. This step can be carried out usingavailable wire-bonding equipment, which can include the use of a singlemachine.

Curved portion 248 can take on a variety of shapes, as needed, toachieve the desired positions of the ends 236 of the wire bonds 232. Forexample, curved portions 248 can be formed as S-curves of variousshapes, such as that which is shown in FIG. 4 or of a smoother form(such as that which is shown in FIG. 5). Additionally, curved portion248 can be positioned closer to base 234 than to end 236 or vice-versa.Curved portion 248 can also be in the form of a spiral or loop, or canbe compound including curves in multiple directions or of differentshapes or characters.

In a further example shown in FIG. 26, the wire bonds 132 can bearranged such that the bases 134 are arranged in a first pattern havinga pitch thereof. The wire bonds 132 can be configured such that theunencapsulated portions thereof 139 including end surfaces 138, can bedisposed at positions in a pattern having a minimum pitch betweenadjacent unencapsulated portions 38 of the wire bonds 32 exposed at thesurface 44 of the encapsulation layer that is greater than the minimumpitch between adjacent bases of the plurality of bases 134 and,accordingly, the conductive elements 128 to which the bases are joined).To achieve this, the wire bonds can include portions which extend in oneor more angles relative to a normal direction to the conductiveelements, such as shown in FIG. 26. In another example, the wire bondscan be curved as shown, for example in FIG. 4, such that the ends 238are displaced in one or more lateral directions from the bases 134, asdiscussed above. As further shown in FIG. 26, the conductive elements128 and the ends 138 can be arranged in respective rows or columns andthe lateral displacement of end surfaces 138 at some locations, such asin one row of the ends, from the respective conductive elements on thesubstrate to which they are joined can be greater than the lateraldisplacement of the unencapsulated portions at other locations from therespective conductive elements to which they are connected. To achievethis, the wire bonds 132 can, for example be at different angles 146A,146B with respect to the surface 116 of the substrate 112.

FIG. 5A shows a further exemplary embodiment of a microelectronicpackage 310 having a combination of wire bonds 332 having various shapesleading to various relative lateral displacements between bases 334 andends 336. Some of wire bonds 332A are substantially straight with ends336A positioned above their respective bases 334A, while other wirebonds 332B include a subtle curved portion 348B leading to a somewhatslight relative lateral displacement between end 336B and base 334B.Further, some wire bonds 332C include curved portions 348C having asweeping shape that result in ends 336C that are laterally displacedfrom the relative bases 334C at a greater distance than that of ends334B. FIG. 5 also shows an exemplary pair of such wire bonds 332Ci and332Cii that have bases 334Ci and 334Cii positioned in the same row of asubstrate-level array and ends 336Ci and 336Cii that are positioned indifferent rows of a corresponding surface-level array. In some cases,the radius of bends in the wire bonds 332Ci, 332Cii can be large suchthat the curves in the wire bonds may appear continuous. In other cases,the radius of the bends may be relatively small, and the wire bonds mayeven have straight portions or relatively straight portions betweenbends in the wire bonds. Moreover, in some cases the unencapsulatedportions of the wire bonds can be displaced from their bases by at leastone minimum pitch between the contacts 328 of the substrate. In othercases, the unencapsulated portions of the wire bonds can be displacedfrom their bases by at least 200 microns.

A further variation of a wire bond 332D is shown that is configured tobe uncovered by encapsulation layer 342 on a side surface 47 thereof. Inthe embodiment shown free end 336D is uncovered, however, a portion ofedge surface 337D can additionally or alternatively be uncovered byencapsulation layer 342. Such a configuration can be used for groundingof microelectronic assembly 10 by electrical connection to anappropriate feature or for mechanical or electrical connection to otherfeatured disposed laterally to microelectronic assembly 310.Additionally, FIG. 5 shows an area of encapsulation layer 342 that hasbeen etched away, molded, or otherwise formed to define a recessedsurface 345 that is positioned closer to substrate 12 than major surface342. One or more wire bonds, such as wire bond 332A can be uncoveredwithin an area along recessed surface 345. In the exemplary embodimentshown in FIG. 5, end surface 338A and a portion of edge surface 337A areuncovered by encapsulation layer 342. Such a configuration can provide aconnection, such as by a solder ball or the like, to another conductiveelement by allowing the solder to wick along edge surface 337A and jointhereto in addition to joining to end surface 338. Other configurationsby which a portion of a wire bond can be uncovered by encapsulationlayer 342 along recessed surface 345 are possible, including ones inwhich the end surfaces are substantially flush with recessed surface 345or other configurations shown herein with respect to any other surfacesof encapsulation layer 342. Similarly, other configurations by which aportion of wire bond 332D is uncovered by encapsulation layer 342alongside surface 347 can be similar to those discussed elsewhere hereinwith respect to the variations of the major surface of the encapsulationlayer.

FIG. 5A further shows a microelectronic assembly 310 having twomicroelectronic elements 322 and 350 in an exemplary arrangement wheremicroelectronic element 350 is stacked, face-up, on microelectronicelement 322. In this arrangement, leads 324 are used to electricallyconnect microelectronic element 322 to conductive features on substrate312. Various leads are used to electronically connect microelectronicelement 350 to various other features of microelectronic assembly 310.For example, lead 380 electrically connects microelectronic element 350to conductive features of substrate 312, and lead 382 electricallyconnects microelectronic element 350 to microelectronic element 322.Further, wire bond 384, which can be similar in structure to variousones of wire bonds 332, is used to form a contact surface 386 on thesurface 344 of encapsulation layer 342 that electrically connected tomicroelectronic element 350. This can be used to directly electricallyconnect a feature of another microelectronic assembly to microelectronicelement 350 from above encapsulation layer 342. Such a lead could alsobe included that is connected to microelectronic element 322, includingwhen such a microelectronic element is present without a secondmicroelectronic element 350 affixed thereon. An opening (not shown) canbe formed in encapsulation layer 342 that extends from surface 344thereof to a point along, for example, lead 380, thereby providingaccess to lead 380 for electrical connection thereto by an elementlocated outside surface 344. A similar opening can be formed over any ofthe other leads or wire bonds 332, such as over wire bonds 332C at apoint away from the ends 336C thereof. In such an embodiment, ends 336Ccan be positioned beneath surface 344, with the opening providing theonly access for electrical connection thereto.

Additional arrangements for microelectronic packages having multiplemicroelectronic elements are shown in FIGS. 27A-C. These arrangementscan be used in connection with the wire bond arrangements shown, forexample in FIG. 5A and in the stacked package arrangement of FIG. 6,discussed further below. Specifically, FIG. 27A shows an arrangement inwhich a lower microelectronic element 1622 is flip-chip bonded toconductive elements 1628 on the surface 1614 of substrate 1612. Thesecond microelectronic element 1650 can overlie the firstmicroelectronic element 1622 and be face-up connected to additionalconductive elements 1628 on the substrate, such as through wire bonds1688. FIG. 27B shows an arrangement where a first microelectronicelement 1722 is face-up mounted on surface 1714 and connected throughwire bonds 1788 to conductive elements 1728. Second microelectronicelement 1750 can have contacts exposed at a face thereof which face andare joined to corresponding contacts at a face of the firstmicroelectronic element 1722 which faces away from the substrate.through a set of contacts 1726 of the second microelectronic element1750 which face and are joined to corresponding contacts on the frontface of the first microelectronic element 1722. These contacts of thefirst microelectronic element 1722 which are joined to correspondingcontacts of the second microelectronic element can in turn be connectedthrough circuit patterns of the first microelectronic element 1722 andbe connected by ire bonds 1788 to the conductive elements 1728 onsubstrate 1712.

FIG. 27C shows an example in which first and second microelectronicelements 1822, 1850 are spaced apart from one another in a directionalong a surface 1814 of substrate 1812. Either one or both of themicroelectronic elements (and additional microelectronic elements) canbe mounted in face-up or flip-chip configurations described herein.Further, any of the microelectronic elements employed in such anarrangement can be connected to each other through circuit patterns onone or both such microelectronic elements or on the substrate or onboth, which electrically connect respective conductive elements 1828 towhich the microelectronic elements are electrically connected.

FIG. 5B further illustrates a structure according to a variation of theabove-described embodiments in which a second conductive element 43 canbe formed in contact with an unencapsulated portion 39 of a wire bondexposed at or projecting above a surface 44 of the encapsulation layer42, the second conductive element not contacting the first conductiveelement 28 (FIG. 1). In one embodiment as seen in FIG. 5B, the secondconductive element can include a pad 45 extending onto a surface 44 ofthe encapsulation layer which can provide a surface for joining with abonding metal or bonding material of a component thereto.

Alternatively, as seen in FIG. 5C, the second conductive element 48 canbe a metallic finish selectively formed on the unencapsulated portion 39of a wire bond. In either case, in one example, the second conductiveelement 43 or 48 can be formed, such as by plating, of a layer of nickelcontacting the unencapsulated portion of the wire bond and overlying acore of the wire bond, and a layer of gold or silver overlying the layerof nickel. In another example, the second conductive element may be amonolithic metal layer consisting essentially of a single metal. In oneexample, the single metal layer can be nickel, gold, copper, palladiumor silver. In another example, the second conductive element 43 or 48can include or be formed of a conductive paste contacting theunencapsulated portion 39 of the wire bond. For example, stenciling,dispensing, screen printing, controlled spraying, e.g., a processsimilar to inkjet printing, or transfer molding can be used to formsecond conductive elements 43 or 48 on the unencapsulated portions 39 ofthe wire bonds.

FIG. 5D further illustrates a second conductive element 43D which can beformed of a metal or other electrically conductive material as describedfor conductive elements 43, 48 above, wherein the second conductiveelement 43D is formed at least partly within an opening 49 extendinginto an exterior surface 44 of the encapsulation layer 42. In oneexample, the opening 49 can be formed by removing a portion of theencapsulation layer after curing or partially curing the encapsulationlayer so as to simultaneously expose a portion of the wire bondthereunder which then becomes the unencapsulated portion of the wirebond. For example, the opening 49 can be formed by laser ablation,etching. In another example, a soluble material can be pre-placed at thelocation of the opening prior to forming the encapsulation layer and thepre-placed material then can be removed after forming the encapsulationlayer to form the opening.

In a further example, as seen in FIGS. 24A-24B, multiple wire bonds 1432can have bases joined with a single conductive element 1428. Such agroup of wire bonds 1432 can be used to make additional connectionpoints over the encapsulation layer 1442 for electrical connection withconductive element 1428. The exposed portions 1439 of thecommonly-joined wire bonds 1432 can be grouped together on surface 1444of encapsulation layer 1442 in an area, for example about the size ofconductive element 1428 itself or another area approximating theintended size of a bonding mass for making an external connection withthe wire bond 1432 group. As shown, such wire bonds 1432 can be eitherball-bonded (FIG. 24A) or edge bonded (FIG. 24B) on conductive element1428, as described above, or can be bonded to the conductive element asdescribed above with respect to FIG. 23A or 23B or both.

As shown in FIGS. 25A and 25B, ball-bonded wire bonds 1532 can be formedas stud bumps on at least some of the conductive elements 1528. Asdescribed herein a stud bump is a ball-bonded wire bond where thesegment of wire extending between the base 1534 and the end surface 1538has a length of at most 300% of the diameter of the ball-bonded base1534. As in other embodiments, the end surface 1538 and optionally aportion of the edge surface 1537 of the stud bump can be unencapsulatedby the encapsulation layer 1542. As shown in FIG. 25B such a stud bump1532A can be formed on top of another stud bump 1532B to form,essentially, a base 1534 of a wire bond 1532 made up of the two ballbonds with a wire segment extending therefrom up to the surface 1544 ofthe encapsulation layer 1542. Such wire bonds 1532 can have a heightthat is less than, for example, the wire bonds described elsewhere inthe present disclosure. Accordingly, the encapsulation layer can includea major surface 1544 in an area, for example overlying themicroelectronic element 1522 and a minor surface 1545 spaced above thesurface 1514 of the substrate 1512 at a height less than that of themajor surface 1544. Such arrangements can also be used to form alignmentfeatures and to reduce the overall height of a package employing studbump type wire bonds as well as other types of wire bonds disclosedherein, while accommodating conductive masses 1552 that can connect theunencapsulated portions 1539 of the wire bonds 1532 with contacts 1543on another microelectronic package 1588.

FIG. 6 shows a stacked package of microelectronic assemblies 410 and488. In such an arrangement solder masses 452 electrically andmechanically connect end surfaces 438 of assembly 410 to conductiveelements 440 of assembly 488. The stacked package can include additionalassemblies and can be ultimately attached to contacts 492 on a PCB 490or the like for use in an electronic device. In such a stackedarrangement, wire bonds 432 and conductive elements 430 can carrymultiple electronic signals therethrough, each having a different signalpotential to allow for different signals to be processed by differentmicroelectronic elements, such as microelectronic element 422 ormicroelectronic element 489, in a single stack.

In the exemplary configuration in FIG. 6, wire bonds 432 are configuredwith a curved portion 448 such that at least some of the ends 436 of thewire bonds 432 extend into an area that overlies a major surface 424 ofthe microelectronic element 422. Such an area can be defined by theouter periphery of microelectronic element 422 and extending upwardlytherefrom. An example of such a configuration is shown from a viewfacing toward first surface 414 of substrate 412 in FIG. 18, where wirebonds 432 overlie a rear major surface of the microelectronic element422, which is flip-chip bonded at a front face 425 thereof to substrate412. In another configuration (FIG. 5), the microelectronic element 422can be mounted face-up to the substrate 312, with the front face 325facing away from the substrate 312 and at least one wire bond 336overlying the front face of microelectronic element 322. In oneembodiment, such wire bond 336 is not electrically connected withmicroelectronic element 322. A wire bond 336 bonded to substrate 312 mayalso overlie the front or rear face of microelectronic element 350. Theembodiment of microelectronic assembly 410 shown in FIG. 7 is such thatconductive elements 428 are arranged in a pattern forming a first arrayin which the conductive elements 428 are arranged in rows and columnssurrounding microelectronic element 422 and may have a predeterminedpitch between individual conductive elements 428. Wire bonds 432 arejoined to the conductive elements 428 such that the respective bases 434thereof follow the pattern of the first array as set out by theconductive elements 428. Wire bonds 432 are configured, however, suchthat the respective ends 436 thereof can be arranged in a differentpattern according to a second array configuration. In the embodimentshown the pitch of the second array can be different from, and in somecases finer than that of the first array. However, other embodiments arepossible in which the pitch of the second array is greater than thefirst array, or in which the conductive elements 428 are not positionedin a predetermined array but the ends 436 of the wire bonds 432 are.Further still, conductive elements 428 can be configured in sets ofarrays positioned throughout substrate 412 and wire bonds 432 can beconfigured such that ends 436 are in different sets of arrays or in asingle array.

FIG. 6 further shows an insulating layer 421 extending along a surfaceof microelectronic element 422. Insulating layer 421 can be formed froma dielectric or other electrically insulating material prior to formingthe wire bonds. The insulating layer 421 can protect microelectronicelement from coming into contact with any of wire bonds 423 that extendthereover. In particular, insulating layer 421 can avoid electricalshort-circuiting between wire bonds and short-circuiting between a wirebond and the microelectronic element 422. In this way, the insulatinglayer 421 can help avoid malfunction or possible damage due tounintended electrical contact between a wire bond 432 and themicroelectronic element 422.

The wire bond configuration shown in FIGS. 6 and 7 can allow formicroelectronic assembly 410 to connect to another microelectronicassembly, such as microelectronic assembly 488, in certain instanceswhere the relative sizes of, for example, microelectronic assembly 488and microelectronic element 422 would not otherwise permit. In theembodiment of FIG. 6 microelectronic assembly 488 is sized such thatsome of the contact pads 440 are in an array within an area smaller thanthe area of the front or rear surface 424 or 426 of the microelectronicelement 422. In a microelectronic assembly having substantially verticalconductive features, such as pillars, in place of wire bonds 432, directconnection between conductive elements 428 and pads 440 would not bepossible. However, as shown in FIG. 6, wire bonds 432 havingappropriately-configured curved portions 448 can have ends 436 in theappropriate positions to make the necessary electronic connectionsbetween microelectronic assembly 410 and microelectronic assembly 488.Such an arrangement can be used to make a stacked package wheremicroelectronic assembly 418 is, for example, a DRAM chip or the likehaving a predetermined pad array, and wherein microelectronic element422 is a logic chip configured to control the DRAM chip. This can allowa single type of DRAM chip to be used with several different logic chipsof varying sizes, including those which are larger than the DRAM chipbecause the wire bonds 432 can have ends 436 positioned wherevernecessary to make the desired connections with the DRAM chip. In analternative embodiment, microelectronic package 410 can be mounted onprinted circuit board 490 in another configuration, where theunencapsulated surfaces 436 of wire bonds 432 are electrically connectedto pads 492 of circuit board 490. Further, in such an embodiment,another microelectronic package, such as a modified version of package488 can be mounted on package 410 by solder balls 452 joined to pads440.

FIGS. 9 and 10 show a further embodiment of a microelectronic assembly510 in which wire bonds 532 are formed on a lead-frame structure.Examples of lead frame structures are shown and described in U.S. Pat.Nos. 7,176,506 and 6,765,287 the disclosures of which are herebyincorporated by reference herein. In general, a lead frame is astructure formed from a sheet of conductive metal, such as copper, thatis patterned into segments including a plurality of leads and canfurther include a paddle, and a frame. The frame is used to secure theleads and the paddle, if used, during fabrication of the assembly. In anembodiment, a microelectronic element, such as a die or chip, can bejoined face-up to the paddle and electrically connected to the leadsusing wire bonds. Alternatively, the microelectronic element can bemounted directly onto the leads, which can extend under themicroelectronic element. In such an embodiment, contacts on themicroelectronic element can be electrically connected to respectiveleads by solder balls or the like. The leads can then be used to formelectrical connections to various other conductive structures forcarrying an electronic signal potential to and from the microelectronicelement. When the assembly of the structure is complete, which caninclude forming an encapsulation layer thereover, temporary elements ofthe frame can be removed from the leads and paddle of the lead frame, soas to form individual leads. For purposes of this disclosure, theindividual leads 513 and the paddle 515 are considered to be segmentedportions of what, collectively, forms a substrate 512 that includesconductive elements 528 in portions that are integrally formedtherewith. Further, in this embodiment, paddle 515 is considered to bewithin first region 518 of substrate 512, and leads 513 are consideredto be within second region 520. Wire bonds 524, which are also shown inthe elevation view of FIG. 10, connect microelectronic element 22, whichis carried on paddle 515, to conductive elements 528 of leads 515. Wirebonds 532 can be further joined at bases 534 thereof to additionalconductive elements 528 on leads 515. Encapsulation layer 542 is formedonto assembly 510 leaving ends 538 of wire bonds 532 uncovered atlocations within surface 544. Wire bonds 532 can have additional oralternative portions thereof uncovered by encapsulation layer 542 instructures that correspond to those described with respect to the otherembodiments herein.

FIG. 11 further illustrates use of an underfill 620 for mechanicallyreinforcing the joints between wire bonds 632 of one package 610A andsolder masses 652 of another package 610B mounted thereon. As shown inFIG. 11, although the underfill 620 need only be disposed betweenconfronting surfaces 642, 644 of the packages 610A, 610B, the underfill620 can contact edge surfaces of package 610A and may contact a firstsurface 692 of the circuit panel 690 to which the package 610 ismounted. Further, portions of the underfill 620 that extend along theedge surfaces of the packages 610A, 610B, if any, can be disposed at anangle between 0° and 90° relative to a major surface of the circuitpanel over which the packages are disposed, and can be tapered from agreater thickness adjacent the circuit panel to a smaller thickness at aheight above the circuit panel and adjacent one or more of the packages.

A package arrangement shown in FIGS. 28A-D can be implemented in onetechnique for making an underfill layer, and in particular a portionthereof that is disposed between confronting faces of packages 1910A and1910B, such as surface 1942 of package 1910A and surface 1916 of package1910B. As shown in FIG. 28A, package 1910A can extend beyond an edgesurface 1947 of package 1910B such that, for example, the surface 1944of encapsulation layer 1942 has a portion thereof that is exposedoutside of package 1910B. Such an area can be used as a dispensing area1949 whereby a device can deposit an underfill material in a flowablestate on the dispensing area from a vertical position relative thereto.In such an arrangement, the dispensing area 1949 can be sized such thatthe underfill material can be deposited in a mass on the surface withoutspilling off of the edge of the surface while reaching a sufficientvolume to flow under package 1910B where it can be drawn by capillaryinto the area between the confronting surfaces of packages 1910A and1910B, including around any joints therebetween, such as solder massesor the like. As the underfill material is drawn between confrontingsurfaces, additional material can be deposited on the dispensing areasuch that a continuous flow is achieved that does not significantlyspill over the edge of package 1910A. As shown in FIG. 28B, thedispensing area 1949 can surround package 1910B and have a dimension Din an orthogonal direction away from a peripheral edge of package 1910Bof about one millimeter (1 mm) on each side thereof. Such an arrangementcan allow for dispensing on one side of package 1910B or more than oneside, either sequentially or simultaneously. Alternative arrangementsare shown in FIG. 28C, wherein the dispensing area 1949 extends alongonly two adjacent sides of package 1910B and have a dimension D′ ofabout 1 mm in a direction orthogonally away from a peripheral edge ofthe second package, and FIG. 28D, wherein the dispensing area 1949extends along a single side of package 1910B and may have a dimension D″in an orthogonal direction away from the peripheral edge of the packageof, for example 1.5 mm to 2 mm.

In an arrangement where microelectronic packages 2010A and 2010B are ofsimilar sizes in a horizontal profile, a compliant bezel 2099 can beused to secure the packages 2010A and 2010B together during attachmentby, for example, joining of terminals of the second package with theelements comprising the unencapsulated portions 2039 of the wire bonds2032, e.g., by heating or curing of conductive masses 2052, e.g.,reflowing of solder masses, to join the packages 2010A and 2010Btogether. Such an arrangement is shown in FIG. 29 in which package 2010Bis assembled over package 2010A with conductive masses 2052, e.g.,solder masses, for example, joined to terminals 2043 on package 2010B.The packages can be aligned so that the solder masses 2052 align withunencapsulated portions 2039 of the wire bonds 2032 of package 2010A orwith second conductive elements joined with the end surfaces 2038 of thewire bonds 2032, as described above. The bezel 2099 can then beassembled around packages 2010A and 2010B to maintain such alignmentduring a heating process in which the terminals of the second packageare joined with the wire bonds 2032 or second conductive elements of thefirst package. For example, a heating process can be used to reflowsolder masses 2052 to bond the terminals of the second package with thewire bonds 2032 or second conductive elements. Bezel 2099 can alsoextend inward along portions of surface 2044 of package 2010B and alongsurface 2016 of package 2010A to maintain the contact between thepackages before and during reflow. The bezel 2099 can be of aresiliently compliant material such as rubber, TPE, PTFE(polytetrafluoroethylene), silicone or the like and can be undersizedrelative to the size of the assembled packages such that a compressiveforce is applied by the bezel when in place. The bezel 2099 can also beleft in place during the application of an underfill material and caninclude an opening to accommodate such application therethrough. Thecompliant bezel 2099 can be removed after package assembly.

Additionally or alternatively, the assembly of microelectronic packages2110A and 2110B, as shown in FIGS. 30A-F, a lower package 2110A caninclude at least one alignment surface 2151. One example of this isshown in FIG. 30A in which alignment surfaces 2151 are included inencapsulation layer 2142 near the corners of the package 2110B. Thealignment surfaces are sloped relative to the major surface and definean angle of between about 0° and up to and including 90° relative tomajor surface 2144 at some location therefrom, the alignment surfacesextending locations proximate the major surface 2144 and respectiveminor surfaces 2145 that are spaced above substrate 2112 at a greaterdistance than major surface 2144. The minor surfaces 2145 can bedisposed adjacent the corners of package 2110A and can extend partiallybetween intersecting sides thereof. As shown in FIG. 30B, the alignmentsurfaces can also form inside corners opposite the intersecting sides ofthe package 2110A and can be included in similar form along all corners,for example four corners, of package 2110A. As illustrated in FIG. 30C,the alignment surfaces 2151 can be positioned at an appropriate distancefrom unencapsulated portions of corresponding wire bonds 2132 such thatwhen a second package 2110B having protrusions, e.g., electricallyconductive protrusions such as conductive masses or solder balls joinedthereto is stacked on top of package 2110A, the alignment surfaces 2151will guide the solder balls into the proper position overlying theunencapsulated portions of the wire bonds 2132 that correspond with thealignment surfaces 2151. The solder balls can then be reflowed to joinwith the unencapsulated portions of the wire bonds 2132 of package2110A.

A further arrangement employing alignment surfaces 2251 is shown inFIGS. 31A-C, wherein the alignment surfaces 2251 extend between a raisedinner surface 2244 to a lower outer surface 2245. In such anarrangement, inner surface 2244 can overlie microelectronic element 2222and can be spaced above substrate 2212 accordingly. Outer surface 2245can be spaced closer to substrate 2212 in a direction of the thicknessof the substrate and can be positioned vertically between surface 2214of substrate 2212 and surface 2223 of microelectronic element 2222. Oneor more unencapsulated portions of wire bonds 2232 can be positionedrelative to the alignment surfaces 2251 to achieve alignment of solderballs 2252 or other conductive protrusion as described with respect toFIGS. 30A-C. As described above, such a stepped arrangement can be usedwith or without the described alignment functionality to achieve anoverall lower assembly height given a certain bond mass size. Further,the incorporation of a raised inner surface 2244 can lead to increasedresistance of package 2210A to warping.

FIG. 12 is a photographic image showing exemplary joints between thewire bonds 632 of a first component 610A and corresponding solder masses652 of a second component such as a microelectronic package 610B. InFIG. 12, reference 620 indicates where an underfill can be disposed.

FIGS. 13A, 13B, 13C, 13D, 13E and 13F illustrate some possiblevariations in the structure of the wire bonds 32 as described aboverelative to FIG. 1. For example, as seen in FIG. 13A, a wire bond 732Amay have an upwardly extending portion 736 which terminates in an end738A having the same radius as the radius of portion 736.

FIG. 13B illustrates a variation in which the ends 738B are tips whichare tapered relative to portion 736. In addition, as seen in FIG. 13C, atapered tip 738B of a wire bond 732A may have a centroid 740 which isoffset in a radial direction 741 from an axis of a cylindrical portionof the wire bond integral therewith. Such shape may be a bonding toolmark resulting from a process of forming the wire bond as will bedescribed further below. Alternatively, a bonding tool mark other thanas shown at 738B may be present on the unencapsulated portion of thewire bond. As further seen in FIG. 13A, the unencapsulated portion 739of a wire bond may project away from the substrate 712 at an angle 750within 25 degrees of perpendicular to the surface 730 of the substrateon which the conductive elements 728 are disposed.

FIG. 13D illustrates that an unencapsulated portion of a wire bond 732Dcan include a ball-shaped portion 738D. Some of all of the wire bonds onthe package can have such structure. As seen in FIG. 13D, theball-shaped portion 738D can be integral with a cylindrical portion 736of the wire bond 732D, wherein the ball-shaped portion and at least acore of the cylindrical portion of the wire bond consist essentially ofcopper, copper alloy or gold. As will be described further below, theball-shaped portion can be formed by melting a portion of the wireexposed at an opening of the capillary of the bonding tool during apre-shaping process before stitch-bonding the wire bond to a conductiveelement 728 of the substrate. As seen in FIG. 13D, the diameter 744 ofthe ball-shaped portion 738D may be greater than the diameter 746 of thecylindrical wire bond portion 736 that is integral therewith. In aparticular embodiment such as shown in FIG. 13D, the cylindrical portionof a wire bond 732D that is integral with the ball-shaped portion 738Dcan project beyond a surface 752 of the encapsulant layer 751 of thepackage. Alternatively, as seen in FIG. 13E, the cylindrical portion ofa wire bond 732D may be fully covered by the encapsulant layer. In suchcase, as seen in FIG. 13E, the ball-shaped portion 738D of the wire bond732D may in some cases be partly covered by the encapsulation layer 751.

FIG. 13F further illustrates a wire bond 732F having a core 731 of aprimary metal and a metallic finish 733 thereon which includes a secondmetal overlying the primary metal, such as the palladium-clad copperwire or palladium-clad gold wire as described above. In another example,an oxidation protection layer of a non-metallic material such as acommercially available “organic solderability preservative” (OSP) can beformed on the unencapsulated portion of a wire bond to avoid oxidationthereof until the unencapsulated portion of the wire bond is joined to acorresponding contact of another component.

FIG. 14 illustrates a method by which wire bonds 32 (FIG. 1) asdescribed herein can be shaped and then stitch-bonded to the conductiveelements 28 on a substrate. As seen therein at stage A, a segment 800,i.e., an integral portion having a predetermined length 802, of a metalwire such as a gold or copper wire or composite wire as described abovedescribed above relative to FIG. 1 is fed out of a capillary 804 of abonding tool. In order to ensure that a predetermined length of themetal wire is fed out from the capillary, the initial wire length can bezeroed or otherwise set to a known length by the bonding toolstitch-bonding the wire then extending from the capillary beforebeginning to feed the wire out for processing. At that time, the segmentmay extend in a straight direction 801 perpendicular to a face 806 ofthe capillary. As seen at stage B, the face 806 of the capillary 804then is moved in at least a first direction 814 along, e.g., parallel toa first surface 812 of a forming unit 810 to bend the metal wire segment800 away from the perpendicular direction. The forming unit 810 may be aspecially designed tool having surfaces suitable to assist in theforming, i.e., shaping, of the metal wire segment prior to the metalwire segment being bonded to the conductive element of the substrate.

As seen at stage B during the pre-forming process, a portion of thesegment 800 may then extend in a direction parallel to the surface 812.Thereafter, as seen at stage C, the capillary is moved over a secondsurface 816 which then causes at least a portion of the segment 800 toproject upwardly in a direction 818 along an exterior wall 820 of thecapillary. After pre-forming the metal wire segment 800 in this manner,the capillary of the bonding tool is now moved away from the formingunit 810 and moved towards the conductive element 28 (FIG. 1) of thesubstrate where it then stitch bonds a portion 822 of the metal wiresegment adjacent to the capillary opening 808 and the capillary face 806to the conductive element. As a result, an end 838 of the metal wiresegment 800 remote from the capillary opening 808 becomes an end 38(FIG. 1) of the wire bond remote from the conductive element 28.

FIG. 15 further illustrates an example of movement of the capillary oversurfaces of a forming unit 810 in a method according to an embodiment ofthe invention. As seen therein, the forming unit 810 may have a firstdepression 830 in which the capillary 804 is disposed when the segment800 is fed out of the opening 808 of the capillary at stage A of theforming process. The depression may include a channel or groove 832which can help guide the segment 800 onto a surface 812 at stage B. Theforming unit may further include a channel 834 or groove for guiding thesegment 800 in stage B of the process. As further shown in FIG. 15, theforming unit may include a further depression 840 having an interiorsurface 816 against which the capillary moves in stage C of the processto cause the metal wire segment to be bent in direction 818 against theexterior wall 820 of the capillary. The depression 840 in one examplemay have a triangular shape as seen in FIG. 15.

In an embodiment, a variation of the capillary shown in FIG. 14 can beused that incorporates a vertical or near-vertical side wall 2820. Asshown in FIG. 35, the side wall 2820 of capillary 2804 can besubstantially vertical or, in other words, parallel to the wire segment2800 or perpendicular to the face 2806 of the capillary 2804. This canallow for formation of a wire bond (32 in FIG. 1) that is closer tovertical, i.e., closer to an angle of 90° away from the surface of thefirst surface of the substrate, than achieved by a side wall at anexterior of the capillary that defines an angle having a measuresubstantially less than 90°, such as the capillary shown in FIG. 14. Forexample, using a forming tool 2810, a wire bond can be achieved that isdisposed at an angle from the first portion which extends between 25°and 90°, or between about 45° and 90° or between about 80° and 90° withrespect to the first wire portion 2822.

In another variation, a capillary 3804 can include a surface 3808 thatprojects beyond the face 3806 thereof. This surface 3808 can beincluded, for example over the edge of the side wall 3820. In the methodfor forming a wire bond (32 in FIG. 1, for example), the capillary 3804can be pressed against the first portion 3822 of the wire segment 3800during forming of wire segment, e.g., when the capillary moves in adirection along a forming surface 3816 which extends in a direction awayfrom surface 3812. In this example, surface 3808 presses into the firstportion 3822 at a location near the bend from which the remaining wiresegment 3800 extends. This can cause deformation of the wire segment3800 such that it may press against the wall 3820 of the capillary 3804and move to a somewhat more vertical position once the capillary 3804 isremoved. In other instances, the deformation from the surface 3808 canbe such that a position of the wire segment 3800 can be substantiallyretained when the capillary 3804 is removed.

FIG. 16 is a photographic image showing that wire bonds 932 formedaccording to one or more of the methods described herein can have ends938 which are offset from their respective bases 934. In one example, anend 938 of a wire bond can be displaced from its respective base suchthat the end 938 is displaced in a direction parallel to the surface ofthe substrate beyond a periphery of the conductive element to which itis connected. In another example, an end 938 of a wire bond can bedisplaced from its respective base 934 such that the end 938 isdisplaced in a direction parallel to the surface of the substrate beyonda periphery 933 of the conductive element to which it is connected.

FIG. 17 illustrates a variation of the above-described pre-formingprocess which can be used to form wire bonds 332Cii (FIG. 5) having abend and which have ends 1038 displaced in a lateral direction 1014Afrom the portions 1022 which will be stitch-bonded to the conductiveelements as bases 1034 of the wire bonds.

As seen in FIG. 17, the first three stages A, B, and C of the processcan be the same as described above with reference to FIG. 14. Then,referring to stages C and D therein, a portion 1022A of the wire bondadjacent the face 806 of the capillary 804 is clamped by a tool whichcan be integrated with the forming unit. The clamping may be performedactively or passively as a result of the motion of the capillary overthe forming unit. In one example, the clamping can be performed bypressing a plate having a non-slip surface thereon onto the metal wiresegment 800 to preclude movement of the metal wire segment.

While the metal wire segment 800 is clamped in this manner, at stage Dshown in FIG. 17, the capillary tool moves in a direction 1016 along athird surface 1018 of the forming unit 1010 and feeds out a length ofwire equivalent to the distance moved along surface 1018. Thereafter, atstage E, the capillary is moved downwardly along a third surface 1024 ofthe forming unit to cause a portion of the wire to be bent upwardlyalong an exterior surface 1020 of the capillary 804. In such way, anupwardly projecting portion 1026 of the wire can be connected to anotherupwardly projecting portion 1036 by a third portion 1048 of the metalwire.

After formation of the wire segment and bonding thereof to a conductiveelement to form a wire bond, particularly of the ball bond typediscussed above, the wire bond (32 in FIG. 1, for example) is thenseparated from a remaining portion of the wire within the capillary(such as 804 in FIG. 14). This can be done at any location remote fromthe base 34 of the wire bond 32 and is preferably done at a locationremote from the base 34 by a distance at least sufficient to define thedesired height of the wire bond 32. Such separation can be carried outby a mechanism disposed within the capillary 804 or disposed outside ofthe capillary 804, between the face 806 and the base 34 of the wire bond32. In one method, the wire segment 800 can be separated by effectivelyburning through the wire 800 at the desired separation point, which canbe done by application of a spark or flame thereto. To achieve greateraccuracy in wire bond height, different forms of cutting the wiresegment 800 can be implemented. As described herein, cutting can be usedto describe a partial cut that can weaken the wire at a desired locationor cutting completely through the wire for total separation of the wirebond 32 from the remaining wire segment 800.

In one example shown in FIG. 32 a cutting blade 805 can be integratedinto the bond head assembly, such as within capillary 804. As shown, anopening 807 can be included in the side wall 820 of the capillary 804through which cutting blade 805 can extend. The cutting blade 805 can bemoveable in and out of the interior of the capillary 804 so that it canalternately allow the wire 800 to freely pass therethrough or engage thewire 800. Accordingly, the wire 800 can be drawn out and the wire bond32 formed and bonded to a conductive element 28 with the cutting blade805 in a position outside of the capillary interior. After bondformation, the wire segment 800 can be clamped using a clamp 803integrated in the bond head assembly to secure the position of the wire.The cutting blade 803 can then be moved into the wire segment to eitherfully cut the wire or to partially cut or weaken the wire. A full cutcan form end surface 38 of the wire bond 32 at which point the capillary804 can be moved away from the wire bond 32 to, for example, formanother wire bond. Similarly, if the wire segment 800 is weakened by thecutting blade 805, movement of the bond head unit with the wire stillheld by the wire clamp 803 can cause separation by breaking the wire 800at the area weakened by the partial cut.

The movement of the cutting blade 805 can be actuated by pneumatics orby a servo motor using an offset cam. In other examples the cuttingblade 805 movement can be actuated by a spring or a diaphragm. Thetriggering signal for the cutting blade 805 actuation can be based on atime delay that counts down from formation of the ball bond or can beactuated by movement of the capillary 804 to a predetermined heightabove the wire bond base 34. Such a signal can be linked to othersoftware that operates the bonding machine so that the cutting blade 805position can be reset prior to any subsequent bond formation. Thecutting mechanism can also include a second blade (not shown) at alocation juxtaposed with blade 805 with the wire therebetween, so as tocut the wire by movement of one or more of the first and second bladesrelative to the other of the first and second blades, such as in oneexample, from opposite sides of the wire.

In another example, a laser 809 can be assembled with the bond head unitand positioned to cut the wire. As shown in FIG. 33, a laser head 809can be positioned outside of capillary 804 such as by mounting theretoor to another point on the bond head unit that includes capillary 804.The laser can be actuated at a desired time, such as those discussedabove with respect to the cutting blade 805 in FIG. 32, to cut the wire800, forming end surface 38 of the wire bond 32 at a desired heightabove the base 34. In other implementations, the laser 809 can bepositioned to direct the cutting beam through or into the capillary 804itself and can be internal to the bond head unit. In an example, acarbon dioxide laser can be used or, as an alternative, a Nd:YAG or a Cuvapor laser could be used.

In another embodiment a stencil unit 824 as shown in FIGS. 34A-C can beused to separate the wire bonds 32 from the remaining wire segment 800.As shown in FIG. 34A, the stencil 824 can be a structure having a bodythat defines an upper surface 826 at or near the desired height of thewire bonds 32. The stencil 824 can be configured to contact theconductive elements 28 or any portions of the substrate 12 or packagestructure connected thereto between the conductive elements 28. Thestencil includes a plurality of holes 828 that can correspond to thedesired locations for the wire bonds 32, such as over conductiveelements 28. The holes 828 can be sized to accept the capillary 804 ofthe bond head unit therein so that the capillary can extend into thehole to a position relative to the conductive element 28 to bond thewire 800 to the conductive element, 28 to form the base 34, such as byball bonding or the like. In one example, the stencil can have holesthrough which individual ones of the conductive elements are exposed. Inanother example, a plurality of the conductive elements can be exposedby a single hole of the stencil. For example, a hole can be achannel-shaped opening or recess in the stencil through which a row orcolumn of the conductive elements are exposed at a top surface 826 ofthe stencil.

The capillary 804 can then be moved vertically out of the hole 828 whiledrawing out the wire segment to a desired length. Once cleared from thehole 828, the wire segment can be clamped within the bond head unit,such as by clamp 803, and the capillary 804 can be moved in a lateraldirection (such as parallel to the surface 826 of stencil 824) to movethe wire segment 800 into contact with an edge 829 of the stencil 824defined by the intersection of the surface of the hole 828 and theoutside surface 826 of the stencil 824. Such movement can causeseparation of the wire bond 32 from a remaining portion of the wiresegment 800 that is still held within the capillary 804. This processcan be repeated to form the desired number of wire bonds 32 in thedesired locations. In an implementation, the capillary can be movedvertically prior to wire separation such that the remaining wire segmentprojects beyond the face 806 of the capillary 804 by a distance 802sufficient to form a subsequent ball bond. FIG. 34B shows a variation ofstencil 824 in which the holes 828 can be tapered such that they have adiameter that increases from a first diameter at surface 826 to agreater diameter away from surface 826. In another variation, as shownin FIG. 34C, the stencil can be formed having an outer frame 821 havinga thickness sufficient to space apart surface 826 at the desireddistance from substrate 12. Frame 821 can at least partially surround acavity 823 configured to be positioned adjacent substrate 12 with athickness of the stencil 824 extending between the surface 826 and theopen area 823 such that the portion of stencil 824 that includes theholes 828 is spaced apart from the substrate 12 when positioned thereon.

FIGS. 18, 19 and 20 illustrate one technique that can be used whenforming the encapsulation layer by molding in order that unencapsulatedportions 39 (FIG. 1) of the wire bonds project beyond a surface 44 ofthe encapsulation layer 42. Thus, as seen in FIG. 18, a film-assistedmolding technique can be used by which a temporary film 1102 is placedbetween a plate 1110 of a mold and a cavity 1112 in which a subassemblyincluding the substrate, wire bonds 1132 joined thereto, and a componentsuch as a microelectronic element may be joined. FIG. 18 further shows asecond plate 1111 of the mold which can be disposed opposite the firstplate 1110.

Then, as seen in FIGS. 19-20, when the mold plates 1110, 1111 arebrought together, the ends 1138 of wire bonds 1132 can project into thetemporary film 1102. When a mold compound is flowed in the cavity 1112to form encapsulation layer 1142, the mold compound does not contact theends 1138 of the wire bonds because they are covered by the temporaryfilm 1102. After this step, the mold plates 1110, 1111 are removed fromthe encapsulation layer 1142, the temporary film 1102 can now be removedfrom the mold surface 1144, which then leaves the ends 1138 of the wirebonds 1132 projecting beyond the surface 1144 of the encapsulationlayer.

The film-assisted molding technique may be well adapted for massproduction. For example, in one example of the process, a portion of acontinuous sheet of the temporary film can be applied to the mold plate.Then the encapsulation layer can be formed in a cavity 1112 that is atleast partially defined by the mold plate. Then, a current portion ofthe temporary film 1102 on the mold plate 1110 can be replaced byautomated means with another portion of the continuous sheet of thetemporary film.

In a variation of the film-assisted molding technique, instead of usinga removable film as described above, a water-soluble film can be placedon an inner surface of the mold plate 1110 prior to forming theencapsulation layer. When the mold plates are removed, the water solublefilm can be removed by washing it away so as to leave the ends of thewire bonds projecting beyond the surface 1144 of the encapsulation layeras described above.

In an example of the method of FIGS. 18 and 19, the heights of the wirebonds 1132 above the surface 1144 of encapsulation layer 1142 can varyamong the wire bonds 1132, as shown in FIG. 37A. A method for furtherprocessing the package 1110 such that the wire bonds 1132 project abovesurface 1142 by substantially uniform heights is shown in FIGS. 37B-Dand utilizes a sacrificial material layer 1178 that can be formed tocover the unencapsulated portions of the wire bonds 1132 by applicationthereof over surface 1144. The sacrificial layer 1178 can then beplanarized to reduce the height thereof to the desired height for wirebonds 1132, which can be done by lapping, grinding, or polishing or thelike. As also illustrated in the Figures, the planarization of thesacrificial layer 1178 can begin by reducing the height thereof to apoint where the wire bonds 1132 become exposed at the surface of thesacrificial layer 1178. The planarization process can then alsoplanarize the wire bonds 1132 simultaneously with the sacrificial layer1178 such that, as the height of the sacrificial layer 1178 is continuedto be reduced, the heights of the wire bonds 1132 are also reduced. Theplanarization can be stopped once the desired height for the wire bonds1132 is reached. It is noted that in such a process the wire bonds 1132can be initially formed such that their heights, while beingnon-uniform, are all greater than the targeted uniform height. Afterplanarization reduces the wire bonds 1132 to the desired height, thesacrificial layer 1178 can be removed such as by etching or the like.The sacrificial layer 1178 can be formed from a material that can allowfor removal by etching using an etchant that will not significantlyaffect the encapsulant material. In one example, the sacrificial layer1178 can be made from a water soluble plastic material.

FIGS. 21 and 22 illustrate another method by which unencapsulatedportions of the wire bonds can be formed which project beyond a surfaceof the encapsulation layer. Thus, in the example seen in FIG. 21,initially wire bonds 1232 may be flush with or may not even be exposedat a surface 1244 of the encapsulation layer 1242. Then, as shown inFIG. 22, a portion of the encapsulation layer, e.g., a moldedencapsulation layer, can be removed to cause the ends 1238 to projectbeyond the modified encapsulation layer surface 1246. Thus, in oneexample, laser ablation can be used to recess the encapsulation layeruniformly to form a planar recessed surface 1246. Alternatively, laserablation can be performed selectively in areas of the encapsulationlayer adjoining individual wire bonds.

Among other techniques that can be used to remove at least portions ofthe encapsulation layer selectively to the wire bonds include “wetblasting” techniques. In wet blasting, a stream of abrasive particlescarried by a liquid medium is directed towards a target to removematerial from the surface of the target. The stream of particles maysometimes be combined with a chemical etchant which may facilitate oraccelerate the removal of material selectively to other structure suchas the wire bonds which are to remain after wet blasting.

In the example shown in FIGS. 38A and 38B, in a variation of the methodshown in FIGS. 21 and 22, wire bond loops 1232′ can be formed that havebases 1234 a on conductive elements 1228 at one end and are attached toa surface of the microelectronic element 1222 at the other end 1234 b.For attachment of the wire bond loops 1232′ to the microelectronicelement 1222, the surface of the microelectronic element 1223 can bemetalized such as by sputtering, chemical vapor deposition, plating orthe like. The bases 1234 a can be ball bonded, as shown, or edge bonded,as can the ends 1232 b joined to the microelectronic element 1222. Asfurther shown in FIG. 38A, the dielectric encapsulation layer 1242 canbe formed over substrate 1212 to cover the wire bond loops 1232′. Theencapsulation layer 1242 can then be planarized, such as by grinding,lapping, polishing, or the like, to reduce the height thereof and toseparate the wire bond loops 1232′ into connection wire bonds 1232A thatare available for joining to at least the end surfaces 1238 thereof forelectrical connection to the conductive elements 1228 and thermaldissipation bonds 1232B that are joined to the microelectronic element1222. The thermal dissipation bonds can be such that they are notelectrically connected to any of the circuitry of the microelectronicelement 1222 but are positioned to thermally conduct heat away from themicroelectronic element 1222 to the surface 1244 of the encapsulationlayer 1242. Additional processing methods can be applied to theresulting package 1210′, as described elsewhere herein.

Another method for forming wire bonds 2632 to a predetermined height isshown in FIGS. 39A-C. In such a method a sacrificial encapsulation layer2678 can be formed over the surface 2614 of substrate 2612, at least inthe second 2620 region thereof. The sacrificial layer 2678 can also beformed over the first region 2618 of the substrate 2612 to cover themicroelectronic element 2622 in a similar manner to the encapsulationlayers described with respect to FIG. 1, above. The sacrificial layer2678 includes at least one opening 2679 and in some embodiments aplurality of openings 2679 to expose the conductive elements 2628. Theopenings 2679 can be formed during molding of the sacrificial layer 2678or after molding by etching, drilling, or the like. In one embodiment, alarge opening 2679 can be formed to expose all of the conductiveelements 2628, while in other embodiments a plurality of large openings2679 can be formed to expose respective groups of conductive elements2628. In further embodiments, openings 2629 can be formed thatcorrespond to individual conductive elements 2628. The sacrificial layer2678 is formed having a surface 2677 at a desired height for the wirebonds 2632 such that the wire bonds 2632 can be formed by bonding bases2634 thereof to the conductive elements 2628 and then drawing out thewire to reach the surface 2677 of the sacrificial layer 2678. Then, thewire bonds can be drawn laterally of the opening to overlie portions ofthe surface 2677 of the sacrificial layer 2678. The capillary of thebond forming instrument (such as capillary 804 as shown in FIG. 14) canbe moved to press the wire segment into contact with the surface 2677such that the pressure on the wire between the surface 2677 and thecapillary causes the wire to sever on surface 2677, as shown in FIG.39A.

The sacrificial layer 2678 can then be removed by etching or anothersimilar process. In an example, the sacrificial layer 2678 can be formedfrom a water soluble plastic material such that it can be removed byexposure to water without affecting the other components of thein-process unit 2610″. In another embodiment, sacrificial layer 2678 canbe made from a photoimageable material such as a photoresist such thatit can be removed by exposure to a light source. A portion ofsacrificial layer 2678′ can remain between microelectronic element 2622and surface 2614 of substrate 2612 that can act as an underfillsurrounding solder balls 2652. After removal of the sacrificial layer2678 an encapsulation layer 2642 is formed over the in-process unit toform package 2610. The encapsulation layer 2642 can be similar to thosedescribed above and can substantially cover surface 2614 of substrate2612 and microelectronic element 2622. Encapsulation layer 2642 canfurther support and separate the wire bonds 2632. In the package 2610shown in FIG. 29C, the wire bonds include portions of the edge surfaces2637 thereof that are exposed at surface 2644 of the encapsulant 2642and extend substantially parallel thereto. In other embodiments, thewire bonds 2632 and the encapsulation layer 2642 can be planarized toform a surface 2644 with wire bonds that have end surfaces exposedthereon and substantially flush therewith.

The above-described embodiments and variations of the invention can becombined in ways other than as specifically described above. It isintended to cover all such variations which lie within the scope andspirit of the invention.

1. (canceled)
 2. A structure comprising: a substrate having a firstregion and a second region, the substrate also having a first surfaceand a second surface remote from the first surface; electricallyconductive elements exposed at the first surface of the substrate withinthe second region; wire bonds having bases bonded to respective ones ofthe conductive elements and ends remote from the substrate and remotefrom the bases, at least one of the wire bonds having a shape such thatthe wire bond defines an axis between the free end and the base thereofand such that the wire bond defines a plane, a bent portion of the atleast one wire bond extending away from the axis within the plane; and adielectric encapsulation layer extending from at least one of the firstor second surfaces and covering portions of the wire bonds such thatcovered portions of the wire bonds are separated from one another by theencapsulation layer, the encapsulation layer overlying at least thesecond region of the substrate, wherein unencapsulated portions of thewire bonds are defined by portions of the wire bonds that are uncoveredby the encapsulation layer, the unencapsulated portions including theends; wherein the conductive elements are configured to couple the wirebonds to one or more microelectronic elements.
 3. The structure of claim2, further including at least one microelectronic element overlying oneof the first surface or the second surface within the first region,wherein at least some of the conductive elements are electricallyconnected to the at least one microelectronic element.
 4. The structureof claim 2, wherein the bent portion is adjacent the base of the atleast one wire bond.
 5. The structure of claim 2, wherein the shape ofthe at least one wire bond is further such that a substantially straightportion of the wire bond extends between the free end and the bentportion along the axis.
 6. The structure of claim 2, wherein the axis isdefined between a portion of the free end and a portion of the base, theaxis being at and tangent to an edge surface of the wire on a sidethereof opposite the bend within both portions.
 7. The structure ofclaim 2, wherein the at least one wire bond includes only a single bentportion.
 8. The structure of claim 2, wherein the axis of the shape ofthe at least one wire bond is at an angle of less than 90 degrees withrespect to the first surface of the substrate.
 9. The structure of claim2, wherein the base of the at least one wire bond is a ball bond, theaxis extending through or along a portion of the ball bond.
 10. Thestructure of claim 9, wherein the end of the at least one wire bond ispositioned directly above the base.
 11. The structure of claim 2,wherein the ends of the wire bonds are defined on tips of the wirebonds, the wire bonds defining respective first diameters between thebases and the tips thereof, and the tips having at least one dimensionthat is smaller than the respective first diameters of the wire bonds.12. The structure of claim 2, wherein the entire wire bond is positionedon the axis or on one side of the axis within the plane
 13. Amicroelectronic package comprising: a substrate having a first regionand a second region, the substrate also having a first surface and asecond surface remote from the first surface; at least onemicroelectronic element overlying the first surface within the firstregion; electrically conductive elements exposed at the first surface ofthe substrate within the second region, at least some of the conductiveelements being electrically connected to the at least onemicroelectronic element; wire bonds having bases bonded to respectiveones of the conductive elements and ends remote from the substrate andremote from the bases, at least one of the wire bonds having a shapesuch that the wire bond defines an axis between the free end and thebase thereof, such that the wire bond defines a plane, and such that abent portion of the at least one wire bond is defined between the baseand the end thereof, wherein the entire wire bond is positioned on theaxis or on one side of the axis within the plane; and a dielectricencapsulation layer extending from at least one of the first or secondsurfaces and covering portions of the wire bonds such that coveredportions of the wire bonds are separated from one another by theencapsulation layer, the encapsulation layer overlying at least thesecond region of the substrate, wherein unencapsulated portions of thewire bonds are defined by portions of the wire bonds that are uncoveredby the encapsulation layer, the unencapsulated portions including theends.
 14. The microelectronic package of claim 13, wherein the bentportion of the at least one wire bond extends away from the axis withinthe plane.
 15. The microelectronic package of claim 13, wherein the bentportion is adjacent the base of the wire bond.
 16. The microelectronicpackage of claim 13, wherein the shape of the at least one wire bond isfurther such that a substantially straight portion of the wire bondextends between the free end and the bent portion along the axis. 17.The microelectronic package of claim 13, wherein the axis is definedbetween a portion of the free end and a portion of the base, bothportions being at and tangent to an edge surface of the wire on a sidethereof opposite the bend.
 18. The microelectronic package of claim 13,wherein the at least one wire bond includes only a single bent portion.19. The microelectronic package of claim 13, wherein the axis of theshape of the at least one wire bond is at an angle of less than 90degrees with respect to the first surface of the substrate.
 20. Themicroelectronic package of claim 13, wherein the base of the at leastone wire bond is a ball bond, the axis extending through or along aportion of the ball bond.
 21. A method of making a microelectronicstructure comprising: forming a plurality of wire bonds on an in-processunit including a substrate having a first surface and a second surfaceremote therefrom and a plurality of conductive elements exposed at thefirst surface, the formation of at least some of the wire bondsincluding: joining a metal wire to a respective one of the conductiveelements to form a base of the wire bond; feeding a predetermined lengthof the wire out of a capillary of a bonding tool; and severing the wiresegment at least by pressing the wire segment into contact with asecondary surface using the capillary so as to form an end of the wirebond remote from the base, an edge surface of the wire bond extendingbetween the base and the end; and forming a dielectric encapsulationlayer on the in-process unit, wherein the encapsulation layer is formedso as to at least partially cover the first surface and portions of thewire bonds such that unencapsulated portions of the wire bonds aredefined by at least the ends of the wire bonds that are uncovered by theencapsulation layer; wherein the steps of feeding and severing arecarried out to impart a shape on the wire bond such that the wire bonddefines an axis between the free end and the base, the wire bond beingbent to extend away from the axis on a plane, and the entire wire bondbeing substantially positioned on the plane on a single side of theaxis.